Experimental determination of the total scattering cross section of water vapour and of the effective beam gas path length in a low vacuum scanning electron microscope
EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany, 2008
ABSTRACT Low Vacuum Electron Microscopy enables the investigation of non-conductive samples witho... more ABSTRACT Low Vacuum Electron Microscopy enables the investigation of non-conductive samples without special preparation procedures. The imaging gas inside the specimen chamber is responsible for the contrast formation by gas amplification and the generated positive gas ions suppress charging of the sample. But the gaseous environment inside the chamber is limiting the capability of the microscope by elastic and inelastic collisions of the primary beam electrons (PEs) with the gas molecules. This so called skirt effect degrades the signal to noise ratio by generating gaseous secondary electrons (SEs) as well as SEs from regions far away from the focused probe. Therefore the primary beam loses exponentially electrons to a broadly dispersed skirt along the beam gas path length (BGPL) (1).
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Papers by S. Mitsche