New comb geometry of capacitive vibration energy harvesters miniaturizing the air damping effect
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), 2017
We report a hierarchical hexahedral geometry of interdigited-comb MEMS capacitor for electrostati... more We report a hierarchical hexahedral geometry of interdigited-comb MEMS capacitor for electrostatic vibration energy harvesters (e-VEHs), where the air damping effect is greatly reduced while the capacitance variation remains important. Based on the same frequency up-conversion structure as in our previous design, the device with the new electrode geometry reaches a larger bandwidth (10∼180 Hz) in air compared to the classical gap-closing structure (80∼160 Hz). The energy extracted in air during each cycle of input excitation is 85 times higher than the classical design @15 Hz / 2 gpeak (20 V), and is no less than 33 times higher within 10∼40 Hz.
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Papers by Yingxian Lu