Optimization of ZnO/Su-8 Based Photopatternable, Piezoelectric Nano-Composites for Mechanical Energy Harvesting Applications
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021
Zinc oxide (ZnO) nano-powder embedded within SU-8 matrix forms a new class of low-cost, large are... more Zinc oxide (ZnO) nano-powder embedded within SU-8 matrix forms a new class of low-cost, large area, photo-patternable piezoelectric thin films enabling the rapid design of mechanical energy harvesters. For wider acceptance of such nano-composites, the deposition and integration process flow optimization in terms of patternability and piezoelectricity is required. In this paper, we report an optimum process flow for ZnO/SU-8 based nano-composite thin films for energy harvesting applications. By varying various patterning parameters, the optimally deposited 15% weight ratio based ZnO/SU-8 nano-composite thin film shows the optimum results with good piezoelectric voltage and transmittance characteristics for reliable photo-lithography. The trade-off between the piezo-response and photopatternability is analyzed using both experiments and finite element simulations. Furthermore, two types of energy harvesting devices are fabricated using the same nano-composite as an active layer which ...
Uploads
Papers by Nadeem beigh